Electrical particle gun

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United States of America Patent

PATENT NO 4825080
SERIAL NO

07100094

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An electrical particle gun with applications in electronic and ionic microlithography for the integrated circuits industry comprises an emission chamber. In the emission chamber are a source adapted to emit the particles and devices for accelerating and focussing the particles. An exciter circuit is electrically connected to a decelerator electrode adjacent the focussing device. This enables pulsed emission of particles with an energy level lying within a predetermined band and filtering of the particles according to their energy level.

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Patent Owner(s)

Patent OwnerAddress
UNIVERSITE DE REIMS CHAMPAGNE-ARDENNE 23 RUE BOULARD 51100 REIMS FRANCENot Provided

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Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances1987198819890255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Troyon, Michel Gueux, FR 1 1

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