Charged particle optical systems having therein means for correcting aberrations
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United States of America Patent
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Apr 18, 1989
Grant Date -
N/A
app pub date -
Jul 13, 1987
filing date -
Jul 16, 1986
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A charged particle optical system, e.g. an energy or mass analyzer or a lens system, has a plurality of corrector electrodes (20 to 23) spaced apart across a particle beam passing from a monoenergetic source (4) to a focus (6) and dividing the beam into individual portions with central trajectories (30,31,32) the connector electrodes being electrically biassed to deflect the particles of the beam so as to reduce the aberration caused by portions with central trajectories intersecting the optical axis at different distances from the desired focus.
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