Compliant motion servo
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United States of America Patent
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-
Apr 4, 1989
Grant Date -
N/A
app pub date -
May 12, 1988
filing date -
May 12, 1988
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An automatic ultrasonic wire bonder employs a compliant motion servo (17, 119, 239, 200) on its Z axis drive to maintain a known, constant and steady force applied by the bonding tool (13) to the wire. The tool is resiliently mounted to a carriage (15) that is driven by a force control servo (17, 119, 238, 200). During bonding, the tool is pressed against the wire, and effects of variations in tool tip Z axis position caused by vibration, wire deformation during bonding and other factors of the equipment are minimized by a servo that precisely controls and maintains a fixed position of the carriage relative to the wire to thereby maintain a preselected force between the bonding tool tip and the wire.
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