Monolythic resonator vibrating beam accelerometer
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United States of America Patent
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Feb 14, 1989
Grant Date -
N/A
app pub date -
Sep 16, 1982
filing date -
Sep 16, 1982
priority date (Note) -
Expired
status (Latency Note)
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Abstract
In order to implement a vibrating beam accelerometer, preferably in a dual beam configuration, a monolithic piezoelectric structure which includes at least a first mounting surface, a second mounting surface spaced therefrom and between the mounting surfaces and coupled thereto a vibrating beam, is provided. The two mounting surfaces are connected to each other by flexures so that relative movement between them is possible. This structure results in a closed path from mounting surface to vibrating beam to mounting surface avoiding problems present in prior art devices in which there were joints at three different points within the closed path.
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