Apparatus for measuring crystal diameter

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United States of America Patent

PATENT NO 4794263
SERIAL NO

07109722

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Abstract

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An apparatus for measuring the diameter of a crystal in which an optical sensor scans along a sensing line which crosses at one point a luminous ring formed at the interface between a crystalline rod and a melt; the picture element position corresponding to a maximum luminance is discriminated when the optical sensor scans; the mean value of the picture element position is calculated over at least one revolution of the crystalline rod; and the diameter D of the crystalline rod at a portion thereof interfacing with the melt is calculated from the mean value and the level of the melt. Similarly, the minimum crystal diameter can be calculated by obtaining the picture element position corresponding to the minimum crystal diameter instead of obtaining the mean of the picture element position.

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Patent Owner(s)

Patent OwnerAddress
SEH AMERICA INCVANCOUVER WA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Baba, Masahiko Takehu, JP 13 189
Hirano, Yoshihiro Annaka, JP 35 429
Katsuoka, Nobuo Takasaki, JP 8 124
Ozaki, Atsushi Annaka, JP 28 387

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