Industrial robot for use in clean room environment

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 4787813
SERIAL NO

07089591

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The foregoing and other objects of the invention are achieved by a drive system which includes a base and a support assembly for rotatably supporting one end of the first arm from said base and for raising and lowering the arm with respect to the base. A second arm has one end rotatably supported at the other end of the first arm and an effector mount is rotatably supported at the other end of the second arm. Drive structure mounted on said base rotate said support assembly. Drive structure mounted at the lower end of said support assembly raise and lower the arm. Drive structure for rotating said second arm and drive structure for rotating said effector are mounted at the upper end of said support. All of said drive structure are mounted within an enclosed housing.

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First Claim

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Patent Owner(s)

Patent OwnerAddress
SILICON VALLEY GROUP THERMAL SYSTEMS LLC440 KINGS VILLAGE ROAD SCOTTS VALLEY CA 95066

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kurita, Samuel S Soquel, CA 1 41
Stevens, Craig L Felton, CA 11 576

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