In-situ wide area vacuum ultraviolet lamp
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United States of America Patent
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Nov 1, 1988
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N/A
app pub date -
Feb 7, 1986
filing date -
Feb 7, 1986
priority date (Note) -
Expired
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Abstract
An open wide area vacuum ultraviolet lamp for use in microelectronics processing applications employes a ring-shaped cold cathode to produce a trapped electron beam discharge of generally disc-shaped cross section in a low pressure molecular gas environment and without the use of VUV windows.
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