Electron beam line evaporator
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United States of America Patent
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Oct 18, 1988
Grant Date -
N/A
app pub date -
Apr 13, 1987
filing date -
Apr 13, 1987
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An electron beam line evaporator for coating heat-sensitive strips or substrates includes a magnetic trap overlying an evaporation crucible to prevent unpermissible heating and static electrification by back-scattered electrons, complemented with means to influence the injection angle of a dynamically deflected electron beam in such a manner that the beam enters the horizontal magnetic field of the trap at the same angle in each deflection phase independent of stray fields. Such means are arranged inside a gap of a pole shoe necessary for the horizontal magnetic field used by the trap and are operative to generate a vertical magnetic field variable in time and locally alongside the pole shoe.
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