Wafer flip apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Oct 18, 1988
Grant Date -
N/A
app pub date -
Feb 9, 1987
filing date -
Feb 9, 1987
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Apparatus is disclosed for automatically transferring a semiconductor wafer between a horizontal and a vertical plane, beginning and ending in precisely located positions. A wafer support arm is carried by a transfer member which also includes a motor for rotating the support arm between a 'start' position and an intermediate position in a horizontal plane. Another motor is provided for rotating the transfer member to position the support arm in a vertical plane. The wafer support arm is then returned to its original position relative to the transfer member, thus establishing a 'finish' position in the vertical plane.
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