Method for forming a hard carbon thin film on article and applications thereof
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United States of America Patent
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Sep 20, 1988
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N/A
app pub date -
Nov 4, 1987
filing date -
Apr 22, 1985
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Abstract
A method of forming diamond-like carbon layer which is advantageously adaptable as a coating layer on acoustic diaphragms. In the method, carbon vaporized out of solid carbon source is deposited onto the surface of the diaphragm as the coating layer in the atomosphere of catalystic gas, for instance, H.sub.2 +Ar or H.sub.2 of about 10.sup.-4 Torr. The deposited carbon layer on the surface of the diaphragm is an amorphous carbon of inclusion of hybridized orbital SP.sup.2 bond and hybridized orbital SP.sup.3 bond and crystalline carbon particles of hybridized orbital SP.sup.3 bond dispersed in the amorphous carbon, or an amorphous carbon of inclusion of hybridized orbital SP.sup.2 bond and hybridized orbital SP.sup.3 bond.
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