Transparent BN-type ceramic material and method of producing the same
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United States of America Patent
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Sep 20, 1988
Grant Date -
N/A
app pub date -
May 21, 1986
filing date -
Oct 4, 1985
priority date (Note) -
Expired
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Abstract
A transparent BN-type ceramic material comprising 10 to 40 wt. % of boron (B), 35 to 55 wt. % of nitrogen (N) and 3 to 40 wt. % of silicon (Si) as the main component elements, and 1 to 10 wt. % of sub-component elements, with the property of not being crystallized by heat treatment at 1600.degree. C. for one hour, and a method of producing the above ceramic material by reacting a boron-containing compound, a nitrogen-containing compound and a silicon-containing compound at deposition temperatures in a range of more than 1300.degree. C. to less than 1700.degree. C. with the total gas pressure within a reaction furnace maintained in the range from 10 Torr to 100 Torr by use of a chemical vapor deposition method are disclosed.
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