Vacuum processing apparatus wherein temperature can be controlled
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United States of America Patent
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Sep 20, 1988
Grant Date -
N/A
app pub date -
Sep 9, 1987
filing date -
Sep 12, 1986
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A vacuum processing apparatus has a vacuum vessel within which a work to be processed is drawn and held fixed on a specimen table by an electrode functioning doubly as an electrostatic chuck, to which is connected a gas feeding pipe for feeding a gas affording good heat transmission between the mutually contacting surfaces of the work and the electrode thereby to control the temperature of the work.
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