High-purity metal and metal silicide target for LSI electrodes
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United States of America Patent
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Sep 13, 1988
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app pub date -
Jun 23, 1986
filing date -
Sep 22, 1983
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Abstract
There is provided a high-purity molybdenum target or high-purity molybdenum silicide target for LSI electrodes which comprises a high-purity metallic molybdenum having an alkali metal content of not more than 100 ppb and a radioactive element content of not more than 10 ppb. Further, a process is provided for producing such target comprising a wet purification processing followed by a series of dry processings.
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