Glow discharge method of applying a carbon coating onto a substrate and coating applied thereby
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United States of America Patent
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Sep 13, 1988
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N/A
app pub date -
Sep 17, 1986
filing date -
Sep 10, 1984
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Abstract
Disclosed is a method of forming a hard, carbonaceous film on a substrate and the hard carbonaceous film formed thereby. The hard carbonaceous film is formed by decomposing a gaseous hydrocarbon having carbon atoms tetrahedrally coordinated to its nearest neighbors through carbon-carbon single bonds. The gaseous hydrocarbon is decomposed in a radio frequency maintained plasma and the plasma decomposition products are deposited on a cathodic substrate. Optionally, fluorocarbons may be present in a decomposition gas.
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