Method and apparatus for enlarging a charged particle beam
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United States of America Patent
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-
Aug 30, 1988
Grant Date -
N/A
app pub date -
Mar 31, 1987
filing date -
Mar 31, 1987
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method and an apparatus for irradiating a relatively large area with a charged particle beam. In the method, a pencil-like beam is generated and spread along a fan axis perpendicular to the beam axis. The fan axis is rotated around the beam axis so that finally a circular area is irradiated. The apparatus includes means for generating a pencil-like beam, a lens system for spreading the beam along the fan axis and means to rotate the fan axis around the beam axis. In a preferred embodiment, the beam is spread such that its transverse intensity distribution increases with increasing distance from the beam center so that the area swept by the beam is irradiated with an even intensity.
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