Method for measuring impurity concentrations in a liquid and an apparatus therefor
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United States of America Patent
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Aug 2, 1988
Grant Date -
N/A
app pub date -
Mar 24, 1987
filing date -
Mar 24, 1986
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method and an apparatus for measuring an impurity concentration of a liquid comprises atomizing step for atomizing the objective liquid, e.g. pure water, having a predetermined droplet size distribution, and an evaporating step for evaporating to dryness the droplets so as to generate fine particles. Those particles are fed to a condensation nuclei counter, hereinafter referred to as CNC, which counts the number of fine particles and has a specified sensitivity characteristic curve. Then impurity concentration of the objective liquid can be measured, since the concentration is related to the counted number of the CNC, the distribution of droplet size of the atomizer, and the sensitivity characteristic of the CNC including the particle deposition loss.
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