Importance

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Abstract

In a method and an arrangement for aligning, examining and/or measuring two-dimensional objects situated on a table of a measuring machine, which table is displaceable at least in two coordinate directions extending perpendicular to one another, light fluxes which are distinguishable according to the associated coordinate direction and which are combined in a beam path and which are imaged in a common intermediate image plane and which are deflected by an optical element according to the coordinate directions associated with them are projected by an imaging system onto the object to be measured in each instance. For the illumination of the respective object structures, an illuminating beam is generated for each coordinate direction, and the object structures illuminated by means of this beam are imaged, separately according to coordinate directions, on scanning means. Furthermore, the object structure images are displaced in both coordinate directions, and the light fluxes resulting from the scanning are converted into electrical signals. These signals serve for the purpose of display, control and/or regulation.

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First Claim