Wafer cassette transfer mechanism
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jun 14, 1988
Grant Date -
N/A
app pub date -
May 5, 1986
filing date -
May 5, 1986
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A wafer cassette transfer mechanism is disclosed which transfers a wafer cassette from a transfer arm to an elevator. The elevator moves vertically, up or down, so as to move the wafer cassette to a second transfer arm. The second transfer arm can then move the wafer cassette to after processing equipment.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully