Superprecision positioning device
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United States of America Patent
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Jun 7, 1988
Grant Date -
N/A
app pub date -
Feb 11, 1987
filing date -
Oct 2, 1986
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A superprecision positioning device includes an output shaft rotor, a plurality of eccentric shaft rotors including an inner eccentric shaft rotor and an outer eccentric shaft rotor, and a bearing base cylinder, electrically rotating and driving mechanism portions being provided between the eccentric shaft rotor and the output shaft rotor, and between the outer eccentric shaft rotor and the bearing base cylinder, respectively, whereby the eccentric shaft rotors and the output shaft rotor may be independently rotated and controlled. With this arrangement, movement in three degrees of freedom may be achieved by translational movement and rotation of the output shaft in a two-dimensional surface, and if an axially movable support shaft is inserted in the output shaft, an article being positioned may be moved with four degrees of freedom in total, providing superprecision positioning in units of 1/10 micron.
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