Optical relay system with magnification

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United States of America Patent

PATENT NO 4747678
SERIAL NO

06942899

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Abstract

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There is disclosed a ring field relay optical system incorporating concave spherical mirrors and including magnification achieved, at least partially, by a convex spherical mirror. In further modifications, aberrations introduced by the convex mirror are controlled by lens groups formed from fused silica. The system is usable from the visible through the deep ultraviolet portion of the spectrum.

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Patent Owner(s)

Patent OwnerAddress
SVG LITHOGRAPHY INC A CORP OF DENot Provided

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Offner, Abe Darien, CT 6 260
Shafer, David R Fairfield, CT 88 2520
Singh, Rama Bethel, CT 2 157

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