Pnictide trap for vacuum systems
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United States of America Patent
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May 24, 1988
Issued Date -
N/A
app pub date -
Jul 16, 1986
filing date -
Feb 17, 1984
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A fore line trap is located before the forepump in a vacuum system. The trap utilizes a cracker, which may be a heated filament or a plasma, and cold walls. The cracker cracks pnictide gas species such as P.sub.4 into other species such as P.sub.2 which have a higher sticking co-efficient. The pnictides are deposited on the cold walls. The cold walls preferably comprise a sleeve which may be removed from the trap and replaced by a clean one.
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