High-vacuum molecular pump
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United States of America Patent
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May 24, 1988
Grant Date -
N/A
app pub date -
Dec 14, 1982
filing date -
Dec 14, 1981
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A high-vacuum molecular pump includes at least two coaxial elements (1 and 2) mounted rotatably with respect to each other and at a small distance from each other. A side of one of the elements (1) positioned opposite a side of another element (2) is provided with at least one helical groove (5), and a pump space (6) is present between these two sides of the elements, which pump space (6) is in communication with a gas supply (7) and a gas discharge (10,8). Near an end of a pair of elements (1 and 2) is a substantially annular gas supply chamber (9) which is bounded by these elements (1 and 2), the annular gas supply chamber (9) being in communication with the gas supply (7) and with the pump space (6) between the two elements (1 and 2), the helical groove (5) extending into the annular gas supply chamber (9). The elements (1 and 2) bounding the annular gas supply chamber (9) are so shaped that the annular gas supply chamber (9) is relatively wide near the gas supply (7), but narrows gradually downstream.
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