Energy and analysis detection system for surface chemical analysis
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United States of America Patent
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Apr 12, 1988
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N/A
app pub date -
Jun 24, 1987
filing date -
Jul 15, 1985
priority date (Note) -
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Abstract
The present invention is directed to an energy analysis and detection system for surface chemical analysis which includes an input lens system for receiving charged particles, said lens system having a first lens stage for definition of analysis area and angular acceptance and a second lens stage for energy adjustment with an aperture assembly interposed between the first lens stage and second lens stage, a spherical capacitor energy analyzer for receiving the output from the input lens system and performing spectroscopic energy resolution, and a detector assembly for receiving the output from the spherical capacitor energy analyzer and detecting the charged particles.
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