Wafer boat transfer tool
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United States of America Patent
Stats
-
Mar 1, 1988
Grant Date -
N/A
app pub date -
May 16, 1986
filing date -
May 16, 1986
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A wafer boat transfer tool has an upper fork and a lower fork which may be differently configured for supporting wafer boats in different ways. The same tool may be used to transfer boats in one or more steps from locations where they are supported in one way to other locations where they are supported in the same or a different way. Also, the tool may be used to transfer more than one boat at a time without excessive travel in a direction parallel to the boat loader axis. A versatile wafer designed for use with two different forks of the tool may be utilized with different boat loaders and a common wafer transfer machine and in-process storage nests.
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