Wafer transfer stand
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jan 26, 1988
Grant Date -
N/A
app pub date -
May 12, 1987
filing date -
May 12, 1987
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Empty wafer cassettes are stored on a transfer stand having one or more storage locations on a post which extends below a wafer comb while the wafers are being processed. Each storage location generally has a cross bar with spaced upward projections for receiving the leg of a cassette.
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