System for optimizing process parameters in photoactive semiconductor manufacturing in-situ
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United States of America Patent
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Oct 13, 1987
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N/A
app pub date -
Jan 25, 1985
filing date -
Jan 25, 1984
priority date (Note) -
Expired
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Abstract
Materials and systems substantially having photoactive properties are produced with a high quality output and without time losses in the fabrication process. To determine the quality of the photoactive material in situ, conductivity is induced in the material by exciting charge carriers through irradiation, and an electromagnetic field influenced thereby is measured, with the result of the measurement being evaluated by a computer with a corresponding control of actuating members such as valves and controllers. Optimum process parameters are thus found and used for the process.
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