Cubic boron nitride preparation

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United States of America Patent

PATENT NO 4683043
SERIAL NO

06820863

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Abstract

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A process for producing coatings comprising cubic boron nitride on a substrate is disclosed. The process involves magnetron sputter deposition of a heated BN source in an evacuated atmosphere having a limited partial pressure of nitrogen and a noble gas. During cathodic sputtering of the BN source, a metal dopant selected from Groups IA, IVA, VA, VIIA, IB, IIB, IIIB, IVB and VB of the periodic table, the metal dopant preferably being Al or Cu, is deposited at a concentration less than 1.5 atomic percent.

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Patent Owner(s)

Patent OwnerAddress
BATTELLE DEVELOPMENT CORPORATION COLUMBUS OHIO A CORP OF DENot Provided

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Melton, Carl W Columbus, OH 1 25
Thompson, Dale G Columbus, OH 2 38
Vassamillet, Larry F Columbus, OH 1 25
Wickersham, Charles E Columbus, OH 12 149

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