Spin castable photobleachable layer forming compositions

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United States of America Patent

PATENT NO 4677049
SERIAL NO

06675915

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Abstract

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Spin castable mixtures having aryl nitrones are provided which are useful in making photobleachable layers for use in contrast enhanced photolithography.

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Patent Owner(s)

Patent OwnerAddress
MICROSI INC10028 SOUTH 51ST STREET A CORP OF DE PHOENIX AS 85044

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Griffing, Bruce F Schenectady, NY 16 336
West, Paul R Clifton Park, NY 58 902

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