Rinsing apparatus and method
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United States of America Patent
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Jun 23, 1987
Grant Date -
N/A
app pub date -
May 20, 1985
filing date -
May 20, 1985
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Rinsing methods and apparatus employ a rotatable work support to spray rinsing liquid against a surrounding wall of a processing station. The rinsing liquid washes residual processing liquid from the surrounding wall of the processing station, whereby the work support performs a cleaning function in addition to its conventional processing function.
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