NPN transistor with base double doped with arsenic and boron

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United States of America Patent

PATENT NO 4667218
SERIAL NO

06208399

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Abstract

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A semiconductor device comprising an N type collector layer formed in an N type semiconductor wafer, a P type base layer which is in contact with the N type collector layer at a PN junction that extends to the surface and which contains an N type impurity material of which the energy of combination with vacancies is great and boron which is a P type impurity material, and an N type emitter layer which is so formed as to be surrounded by this P type base layer and forms a transistor together with the N type collector layer and the P type base layer and which contains the N type impurity materials phosphorus and arsenic. Arsenic or antimony or the like, which are N type impurity materials of which the energy of combination with vacancies is great are diffused in the P type base layer.

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Patent Owner(s)

Patent OwnerAddress
TOKYO SHIBAURA ELECTRIC COMPANY LIMITEDKAWASAKI

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ishida, Hidekuni Yokohama, JP 4 36
Takahashi, Kouichi Yokohama, JP 34 263
Yonezawa, Toshio Yokosuka, JP 55 971

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