Electrostatic chuck
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United States of America Patent
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Feb 24, 1987
Grant Date -
N/A
app pub date -
Jul 30, 1985
filing date -
Jul 31, 1984
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An electrostatic chuck for holding a work by electrostatic forces, which has an electrostatic attraction body for attracting the work, an electrostatic conductive support body for supporting the electrostatic attraction body, channels for passing cooling medium therethrough and cover means for covering the exposed surfaces of the support body except a portion thereof over which the work is placed. This chuck can not only prevent impure matters from generating from the surfaces of the support body but also prevent damages due to heat.
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