Magnet driving method and device for same
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United States of America Patent
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-
Jul 15, 1986
Grant Date -
N/A
app pub date -
Jul 24, 1985
filing date -
Jul 25, 1984
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A plurality of bar-like magnets are arranged in a vacuum chamber at an equal space interval to form a plurality of strong magnetic fields in a stripe-pattern form and the magnets are moved reciprocally in the direction of arrangement of the magnetic fields while changing gradually the stop points of the magnets over a work to be processed by etching or sputtering in a step-like manner so that the integral effect of each magnetic field acting on the work is uniform over the entire region of the work.
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