Apparatus for producing a semiconductor device
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United States of America Patent
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May 13, 1986
Issued Date -
N/A
app pub date -
Oct 24, 1980
filing date -
Dec 24, 1975
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A process tube that is impermeable to impurities for use in the manufacture of semiconductor devices. The process tube is made of sintered silicon carbide and it may optionally be infiltrated with elemental silicon. The inner surface of the process tube includes a layer of high density silicon carbide to prevent diffusion of impurity species through the walls of the process tube.
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