Centrifugal wafer processor
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United States of America Patent
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Feb 25, 1986
Grant Date -
N/A
app pub date -
May 17, 1984
filing date -
May 17, 1984
priority date (Note) -
Expired
status (Latency Note)
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Abstract
In a rinser/dryer for carriers of semiconductor wafers, a rotatable frame containing the carrier is directly mounted to, and cantilevered from the drive motor. A container encloses the rotatable frame and carrier. A gas pressurized labyrinth seal separates the inside of the container from the drive motor to prevent contamination. A raised portion in the labyrinth seal, with gas inlets on each side of the raised portion, forms a pressure barrier inhibiting the passage of moisture and contaminates across the barrier.
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