Method and apparatus for handling charged particle beam
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Nov 19, 1985
Grant Date -
N/A
app pub date -
Jul 18, 1983
filing date -
Jul 22, 1982
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
In a method of and an apparatus for handling a charged particle beam, at least one of a signal representative of the astigmatism and a signal for correction of the astigmatism is obtained by computation on the basis of values detected under a certain condition from signal particles derived from an object which is moved repeatedly at least two directions with respect to a charged particle beam. The amount and direction of astigmatism thus computed are displayed respectively for manual correction. Astigmatism correction and focusing can be also carried out automatically.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully