Pump with magnetic bearings
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United States of America Patent
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-
Sep 17, 1985
Grant Date -
N/A
app pub date -
Oct 19, 1983
filing date -
Oct 23, 1982
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A turbo-molecular pump with passive, radial magnetic bearings and axial bearings has both direct and indirect damping arrangements for unwanted oscillations. Direct damping is produced by eddy currents produced in copper rings around the magnetic stators of the magnetic bearings. Indirect damping is provided through a platform, carried by springs and connected to the pump housing by oscillation dampers.
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