Crystal growing apparatus
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United States of America Patent
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Apr 23, 1985
Grant Date -
N/A
app pub date -
Aug 10, 1983
filing date -
Aug 19, 1982
priority date (Note) -
Expired
status (Latency Note)
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Abstract
In a crystal growing apparatus, an electrode is arranged above a crystal raw material melt at a distance therefrom. Changes in the resistance of the atmosphere between the electrode and the melt are detected so as to detect the surface level of the melt. The crystal pulling speed or power supply for heating the melt is controlled in accordance with the detection result, thereby performing dimension control of the crystal.
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