Turbo-molecular pump
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United States of America Patent
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-
Mar 5, 1985
Grant Date -
N/A
app pub date -
Feb 10, 1983
filing date -
Feb 11, 1982
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A turbo-molecular pump has passive magnetic bearings which are radially stable but axially unstable and mechanical thrust bearings acting axially, the magnetic bearings and the stator forming a structural unit movable axially within the pump housing and connected to an element adjustably supporting one thrust bearing while the other thrust bearing is fixed to the housing with control gear being provided for adjusting the structural unit relative to the housing and the thrust bearing relative to the structural unit in dependence on force sensing devices.
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