Magnetically-assisted sputtering method for producing vertical recording media
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United States of America Patent
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Dec 11, 1984
Issued Date -
N/A
app pub date -
Oct 28, 1983
filing date -
Jan 31, 1983
priority date (Note) -
Expired
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Abstract
Disclosed is a method for producing vertical recording media by using magnetically-assisted sputtering apparatus to sputter from a magnetic target while selected portions of the target are heated to a temperature at or above Curie. Also disclosed are improved means for supporting the magnetic target during sputtering which permits the realization of enhanced sputtering efficiencies.
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