In situ differential thermal analysis for HgCdTe LPE

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United States of America Patent

PATENT NO 4474640
SERIAL NO

06326301

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Abstract

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For HgCdTe liquid phase epitaxy (LPE), in situ differential thermal analysis apparatus is used to precisely monitor the liquidus temperature of each HgCdTe melt. The neutral body, e.g. a slug of copper enclosed in a silica ampoule, is placed near the LPE reactor in a furnace. During heating or cooling, differential sensing of a pair of thermocouples (in the melt and in the neutral body) will show an accelerated change at transformation points, since at these points the temperature of the melt will be changed by the energy of the physical change, while that of the neutral body remains subject only to passive heat transfer. Thus, the actual liquidus temperature of each melt can be measured with extreme precision, and isothermal or programmed cooling methods of LPE can be precisely and reliably controlled under production conditions.

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Patent Owner(s)

Patent OwnerAddress
RAYTHEON TI SYSTEMS INC2501 SOUTH HIGHWAY 121 LEWISVILLE TX 75067

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Wan, Chang-Feng Plano, TX 21 526

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