Preventing side-etching by adhering an overhang mask to the sidewall with adhesive
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United States of America Patent
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-
Sep 11, 1984
Grant Date -
N/A
app pub date -
May 18, 1983
filing date -
May 24, 1982
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A metal member to be etched is subjected to chemical etching through a mask having a predetermined pattern whereafter that portion of the mask overhanging a side-etched portion resulting from the etching is bent down to be joined by an adhesive binder to the side wall of the side-etched portion to form an etching-resistant layer on the side wall. Then the metal member is subjected again to etching through the etching-resistant layer and the mask.
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