Apparatus for loading and unloading a furnace
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United States of America Patent
Stats
-
Apr 3, 1984
Grant Date -
N/A
app pub date -
Dec 30, 1981
filing date -
Dec 30, 1981
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A device to load semiconductor wafers into a furnace when the wafers are contained in a boat, the device including a tower movable horizontally on rails and a ram mounted on the tower to be independently movable horizontally so that the joint movement of the ram and the tower provide a telescoping effect, the ram also being tiltable in a vertical plane to a position with its end higher than the portion attached to the tower whereby a boat carrier held on the end of the ram in its tilted position can be placed in the furnace, lowered into contact with the furnace floor by moving the ram to a horizontal position and then retracted without causing sliding of the boat carrier against the furnace floor.
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