Thin films of compounds and alloy compounds of Group III and Group V elements
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United States of America Patent
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Jan 24, 1984
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N/A
app pub date -
Jan 8, 1982
filing date -
Jan 16, 1981
priority date (Note) -
Expired
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Abstract
A thin film of a compound or alloy compound of Group III and Group V elements, particularly of gallium arsenide or gallium arsenide compounds, is produced by impinging, e.g. spraying, onto a heated substrate a liquid or liquids comprising molecules carrying the constituent elements of the desired film. The constituent elements react together on or immediately above the heated substrate to form the desired compound or alloy compound which is deposited on the substrate in the form of a thin film. The resulting thin films may be used in solar cells and other opto-electronic devices.
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