Closure and seal construction for high-pressure oxidation furnace and the like

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 4427378
SERIAL NO

06363062

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A closure and seal construction for a high-pressure oxidation furnace and the like having a quartz chamber and an integral quartz wall formed with an opening for receiving into the chamber material to be processed, the wall providing an annular surface surrounding the opening and being formed with an annular recess in the surface surrounding the opening; a combined cooling and sealing tube mounted in the recess and protruding slightly therefrom; a closure mounted for engagement with the tube and wall surface; and the tube having an elasticity responsive to a closing pressure to resiliently retract and provide simultaneous sealing engagement of the closure with the wall surface and tube.

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Patent Owner(s)

Patent OwnerAddress
GASONICS INCNot Provided

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bowers, Gerald M Boonville, CA 5 79

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