Magnetic objective lens for use in a scanning electron microscope
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United States of America Patent
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-
Dec 6, 1983
Grant Date -
N/A
app pub date -
Jan 11, 1982
filing date -
Jan 14, 1981
priority date (Note) -
Expired
status (Latency Note)
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Abstract
In a scanning electron microscope, an objective lens has upper, lower and outer magnetic pole pieces. The bore diameter of the lower magnetic pole piece is smaller than those of said upper and outer magnetic pole pieces. The lens field between said upper and lower magnetic pole pieces is generated for observing a bulk specimen positioned at a long working distance. The lens field between said lower and outer magnetic pole pieces is generated for obtaining a high resolution image of a specimen.
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