Gas discharge laser having a buffer gas of neon
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United States of America Patent
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Jul 12, 1983
Issued Date -
N/A
app pub date -
Nov 3, 1981
filing date -
Jul 24, 1978
priority date (Note) -
Expired
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Abstract
The output power and efficiency of a gas discharge laser is substantially improved by the substitution of neon (Ne) for helium (He) as a buffer in the lasing medium. One embodiment of the invention is a pulsed excimer laser having a lasing gas comprising a mixture of krypton (Kr) and fluorine (F.sub.2). Use of Ne with the KrF excimer lasing medium further enables advantageous utilization of corona wire pre-ionization to initiate the main discharge of this type of laser.
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