Solid state image sensing device for enhanced charge carrier accumulation

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United States of America Patent

PATENT NO 4385307
SERIAL NO

06201998

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Abstract

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A so-called buried channel type solid state image sensing device is formed with a channel layer of the opposite conductivity type in the surface of a semiconductor substrate. An insulating layer is formed on the surface of the semiconductor substrate and spaced apart photo-electrode and a charge transfer electrode are buried in the insulating film and a shift electrode is buried therebetween. A channel layer is provided beneath the photoelectrode and the charge transfer electrode whereas no channel layer is formed beneath the shift electrode. But instead a portion of the surface of the semiconductor substrate is located beneath the shift electrode. Since no channel layer is provided beneath the shift electrode, a sufficient quantity of charge carriers is accumulated in a potential well formed in the channel layer beneath the photoelectrode.

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Patent Owner(s)

Patent OwnerAddress
TOKYO SHIBAURA ELECTRIC CO LTD A CORP OF JAPAN72 HORIKAWA-CO SAIWAI-KU KAWASAKI-SHI

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Suzuki, Nobuo Kamakura, JP 267 4339

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