Electron beam sensitive resist of an anhydride copolymer
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United States of America Patent
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Mar 1, 1983
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app pub date -
May 24, 1982
filing date -
Mar 12, 1982
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Abstract
This invention describes an ionizing radiation sensitive material having high contrast, high sensitivity and comprised of a mixed half-ester or half amide of the reaction of an N-hydroxy or N-aminoalkyl amide and a hydroxy alkyl terminally unsaturated compound with an alkylvinyl ether-maleic anhydride copolymer. A typical material is made by reacting hydroxyethyl pyrrolidone and hydroxyethyl acrylate with octadecylvinyl ether-maleic anhydride copolymer.
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