Charged particle spectrometers
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United States of America Patent
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-
Nov 9, 1982
Grant Date -
N/A
app pub date -
Nov 26, 1980
filing date -
Nov 30, 1979
priority date (Note) -
Expired
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Abstract
An electron spectrometer includes a hemispherical analyzer and a multi-element optical lens system. The lens system has, at its entrance, two spaced apart mesh elements which are concave toward the sample, for reducing the lens aberrations, and switching means operable to change the potentials on the lens elements to optimize the performance of the spectrometer for both Auger Electron Spectrometry and X-ray Spectrometry.
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