Humidity sensor element
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United States of America Patent
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Aug 10, 1982
Grant Date -
N/A
app pub date -
Jun 3, 1980
filing date -
Jun 7, 1979
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A humidity sensor element comprising a metal oxide semiconductor sintered member having a composition composed of TiO.sub.2 and V.sub.2 O.sub.5, the member being formed with a pair of electrodes. When the element is used at a temperature of less than 400.degree. C., it is possible to detect the humidity as a variation of electric resistance.
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